Influence of metal admixture of tin on the processes of nanocomposite silicon-oxide thin film formation
Voitovych V.V. 1, Rudenko R.M. 1, Kolosiuk A.G. 1, Krasko M.M. 1, Povarchuk V.Yu. 1, Voitovych M.V. 2 , Yuchymchuk V.O. 2
1 Institute of Physics of the NAS of Ukraine. Prospect Nauki, 46, Kyiv-03039, Ukraine. 
E-mail: vvoitovych@yahoo.com
2 V.E. Lashkaryov Institute of Semiconductor Physics of the NAS of Ukraine. Prospect Nauki, 45, Kyiv-03028, Ukraine. 

	The crystalline silicon of nano-size (nc-Si) in an amorphous matrix of SiO2 exhibits light-emitting properties in the visible and near-infrared light spectrum [1]. An increase in the intensity and expansion of the spectral radiation range of such material (nc-Si/SiO2) is important for its practical application. In our previous work we have shown that it is possible to significantly influence the processes of formation of nc-Si in the SiO2 matrix by doping such structures with tin atoms [2]
	In the present work,the samples were obtained by the method of thermal evaporation of the melt of a mixture of SiO and Sn powders in various volume ratios (100: 0; 100: 0.5; 100: 1; 100: 2) in a vacuum (~ 10 -3 Pa) and a film deposition on silicon, quartz and sapphire substrates. In order to transform amorphous silicon-oxide films into amorphous-crystalline, samples were subjected to isochronous heat treatment in the range of temperatures 300-1100 ° C in an atmosphere of argon. Surface samples, specimen distribution profiles, and admixtures content in the oxide matrix of the samples under study were performed using OGE spectroscopy. It was found that the solubility of tin atoms in the investigated films is about 2.3 at. %, and an excess of tin is collected in metal clusters in the samples. In samples containing metallic tin clusters we observed crystallization of amorphous silicon at significantly lower temperatures than in samples without metallic clusters and without tin atoms. The obtained results indicate the metal-induced mechanism of crystallization of amorphous silicon in the investigated samples

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