Nanocomposites and nanomaterials
Peculiarities of nanoporous anodic alumina formation on thin aluminum films

T.S. Lebyedyeva1, P.B. Shpylovyy1, M. Skoryk2
1 1V.M. Glushkov Institute of Cybernetics, Nat. Acad. of Sci. of Ukraine. Acad. Glushkov’s Prosp., 40, Kiev-03680, Ukraine. 
E-mail: lebtetyana@gmail.com
2 NanoMedTech LLC, Antonovycha Str., 68, Kyiv, 03680, Ukraine.

The researches on the formation of porous anodic alumina (PAA) films for use of their nanoscale properties can be divided into two main areas: growing oxide on a bulk aluminum, foils and plates and on films deposited on the substrates. Nanostructured PAA films growth on thin Al layers deposited on hard and flexible substrates, which are already widely used in microelectronics, seems to bring more promising results. Aluminum films produced under various conditions differ from each other – according to structural parameters, density of grains packing and their surface roughness. The influence of the aluminum films structure on the growth of PAA is being studied [1, 2].
This work is devoted to the development and investigation of in-situ controlled process for the formation of PAA, thin-films structures PAA/Al, and Al nanomesh layers from thin aluminum films deposited by a direct current magnetron on glass substrates with an adhesive layer of Nb. In order to control in-situ anodic oxidation processes and etching of PAA the method of the monitoring    an angular reflection curves was applied. The obtained nanostructures were studied by the SEM method. Particular attention is paid to the connection between the features of the initial Al films and the formed PAA based nanosructures.

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2.	Lebyedyeva T, Kryvyi S, Lytvyn P, Skoryk M, Shpylovyy P. Formation of  nanoporous anodic alumina by anodization of aluminum films on glass substrates. Nanoscale Res Let. 2016;11:203.