Physico-Chemical nanomaterials science

Stability of Electrical Properties of Proton Modificated Subsurface Layer in Si Matrix
Kozonushchenko О.I.1, Sadovnikova M.L.1, Vasiljev A.G.1, Vdovenkov A.A.1
1 Institute of High Technologies, Taras Shevchenko National University of Kyiv, 64/13, Volodymyrska Str., Kyiv 01601, Ukraine, email: marialeos@ukr.net

Fig.1 SEM photo of the irradiated specimens	
The creating of materials with predicted physical properties and stable electric characteristics is up-today necessity. There are lot amount of the modern technologies, which allow realizing predicted physical properties. The modification of materials by proton beams with energies of a few MeV is one of them.
The modification of materials by proton beams was carried out using the equipment "Kiev nuclear microprobe". The irradiation of Si-monocrystals by protons with energy EH+=1.5 MeV took place in April-May 2016. The electro-physical properties of the specimens before and after irradiation were established. The modification of irradiated specimens’ electro-conductivity was observed. The thin layer with significant increased conductivity was founded under the surface of specimen. In 2017 the investigations specimens’ electro-physical properties secondary were carried out, which confirmed the results of work 2016. This work is continuation of the previous investigations (IEEE 37th International Scientific Conference on Electronics and Nanotechnology, 2017 IEEE International Young Scientists Forum on Applied Physics and Engineering (YSF)). The extended investigations using electronic microscope “SEM HITACHI S-806” modified in such way which allowed supplying the voltage to the specimen during the measurements were carried out in 2017. The obtained SEM photo of the irradiated specimens is presented on the Fig.1. The dark part of SEM image is corresponds to the layer with higher conductivity in comparison with Si matrix. In 2018 the full complex of previous investigations with specimens irradiated in 2016 ones more was carried out. The investigation’ data within the margin of the experiments’ errors, repeated the previous.
The obtained repetitive results of 2016, 2017 and 2018 show the stability to ageing of irradiated specimens’ resistance-temperature dependences.