Nanostructurized Surfaces
Using of High Voltage Glow Discharge Electron Guns For Obtaining Of Ceramic Nanostructurized Thin Films
Melnyk I.V., Melnyk V.G., Tugai B.A., Tuhai S.B.
1 Electrjnic Instrument and Devices Department, Faculty of Electronics,  National  Technical University of Ukraine ‘Igor Sikorskiy Kiev Polytechnical Institute’, Prospect Peremigy, 37, korpus 12, 03056, Kyiv, Ukraine. 
E-mail: imelnik@phbme.kpi.ua

Glow discharge electron guns are widely used in industry for realizing different technological operations, including deposition of ceramic thin films in the high vacuum [1, 2]. The main advantages of such type of guns are simplicity of construction and possibility of repairing, long life time of the cold cathode, relative cheapness of both electron gun and evacuation equipment, possibility of realizing technological operations in the different gases, including active and noble ones, as well as simplicity of control beam current both by changing the pressure in discharge chamber [3] and electrically, by lighting additional low-voltage discharge in the anode hollow [4].
Such guns are very profitable for using in obtaining of nanostructorized ceramics films by the reason of possibility of using active gases, such as oxygen, nitrogen, carbon oxide or sulfurous anhydride, which are suitable for realizing technological process, as operation gas of electron gun. For maintaining of films chemical structure low-voltage arc discharge under the crucible also can be used. Using of impulse regime of gun operation for obtaining the composite films from ceramic with different melting point is also possible [4].

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3.	Denbnovetsky S.V., Melnyk V.I., Melnyk I.V., Tugay B.A. “Model of control of glow discharge electron gun current for microelectronics production applications”, Proc. of SPIE, Sixth Intern. Conf. “Material Science and Material Properties for Infrared Optoelectronics”, vol. 5065, pp. 64 – 76, 2003.
4.	Melnik I.V. “Estimation of current rise time of glow discharge in triode electrode system in case of control pulsing”, Radioelectronics and Communication Systems, Vol. 56, # 12, pp. 51 – 61, 2013.