Nano-structured surfaces

Algorithms and software tools for analysis of MEMS sensors noise parameters and noise immunity data transmission systems development
Prudyus I.N., Holyaka R.L., Fabirovkyy S.Ye., Marusenkova T.A., Miskiv V.-M.V.
Institute of Telecommunications, Radioelectronics and Electronic Engineering, Lviv Polytechnic National University, St. Bandery street, 12, Lviv-79013, Ukraine. 
E-mail: fabirovskii@gmail.com

Inertial measurement units (IMUs) are the main components of navigation devices that allow us to detect the coordinates of moving objects. Typically an IMU incorporates a triaxial (3D) accelerometer and a 3D gyroscope. Both are manufactured by technologies of surface micro-and nano-structuring and integrating into MEMS (Micro-Electro-Mechanical System) [1]. 
Many factors influence the accuracy of measuring the linear and angular accelerations of MEMS sensors and, consequently, the accuracy of a moving object pose estimation. Among these factors one can mention the time and temperature stability of measurement processes, thermal noise, flicker noise, etc [2].
The work presents the results of developing an algorithm for investigation into noise parameters and time stability of MEMS sensors along with a software tool based on this algorithm – MEMS TESTER. Using data acquired during such an investigation into MEMS sensors noise terms, one can detect the noise sources and develop specialized methods of adaptive filtering signals from these sensors. The most common tool for noise analysis is the Allan variance and its modifications. Adaptive filtering is usually done using variations of the Kalman filter. While studying MEMS sensors noise terms, one can preset measurement modes (measurement ranges and sample rates) and methods of signal processing (histograms, spectrum and correlation analysis, etc). The software tool enables to develop effective correlators of noise immunity data transmission systems.

1.	Ming-Han Tsai, Yu-Chia Liu, Weileun Fang. A Three-Axis CMOS-MEMS Accelerometer Structure With Vertically Integrated Fully Differential Sensing Electrodes // Journal of Microelectromechanical Systems. - 2012 . - Volume: 21 , Issue: 6. – P. 1329 - 1337.
2.	R.P. Leland. Mechanical-thermal noise in MEMS gyroscopes // IEEE Sensors Journal. - 2005. - Volume: 5 , Issue: 3. - P. 493 - 500.