Nanostructured surfaces

Arc-PVD ZrN and ZrCN coatings obtained with modified curvilinear magnetic filter and plasma source
Romaniuk S.P.1, Taran A.V.2, Garkusha I.E.2, Taran V.S.2, Timoshenko A.I.2, Misiruk I.A.2, Starikov V.V.3, Baturin A.A.3, Nikolaychuk G.P.3
1 Kharkiv Petro Vasylenko National Technical University of Agriculture
44, Alchevskikh St., Kharkiv, 61002, Ukraine. 
E-mail: romaniuk.khntusg@gmail.com 
2 National Science Center “Kharkov Institute of Physics and Technology” (NSC KIPT), Institute of Plasma Physics
1, Akademicheskaya St., Kharkov, 61108, Ukraine.
3 National Technical University “Kharkov Polytechnic Institute”
2, Kyrpychova str., Kharkiv, 61002, Ukraine.

ZrN and ZrCN coatings were produced by the vacuum-arc deposition technique with the application of modified curvilinear magnetic filter allowed enhanced deposition rates decreasing the amount of macro-particles [1]. A new source of filtered vacuum arc plasma was also used that provided transportation to the condensation surface of at least 60 % of the ions current emitted by cathode spots. The deposition rate reached several tens of microns per hour that was comparable to traditional sources of unfiltered plasma. The area occupied by macroparticles was less than 0.2 % of total coating area per 1 μm of its thickness. The structure, chemical and phase composition of the obtained coatings were investigated by XRD, SEM, XRF and nanoidentation method [2]. The SEM cross-sections images revealed smooth and almost droplet free surface. 

1.	Taran A.V., Garkusha I.E., Taran V.S., Muratov R.M., Skoblo T.S., Romaniuk S.P., Starikov V.V., Baturin A.A. Synthesis and characterisation of nanocrystalline ZrN PVD coatings on AISI 430 stainless steel // Problems of atomic science and technology. Series: Plasma Physics.-2019.-25, N1.-Р. 243-247.
2.	Skoblo T.S., Romaniuk S.P., Sidashenko A.I., Garkusha I.E., Taran V.S., Taran A.V., Pilgui N.N. Strengthening method for thin-walled knives with multi-layer nanocoatings and quality assessment by non-destructive method // Journal of Advanced Microscopy Research.-2018, -13, N 3.- Р. 333-338.