Physico-Chemical Nanomaterials Science

Structure and Properties of АlN-SiC Coatings Obtained by Magnetron Sputtering
Mazilin B.O., Lytovchenko S.V., Beresnev V.M., Horokh D.V.
V.N. Karazin Kharkiv National University, 4, Svobody Sq., 61000 Kharkiv, Ukraine
E-mail: mazilin@karazin.ua

Deposition of functional coatings on details and tools working in harsh conditions is one of the most promising ways to improve their performance characteristics. Deposition of composite protective coatings by magnetron sputtering is a rapidly developing trend in this area. Today, coatings based on the SiC-AlN system pose a significant interest due to a complex of specific properties in carbonitride composites, particularly, a happy blend of high hardness with sufficient plasticity, enhanced radiation resistance and good absorption of high-frequency radiation [1]. 
A SiC-AlN target cathode of 100 mm in diameter and 3 mm thick was obtained by slurry coating from powder mixture of 50 SiC + 50 AlN (mol.%). Deposition of coatings on substrates from 12Х18Н10Т stainless steel was done by direct current magnetron sputtering in different gaseous environments: in argon or in an argon-nitrogen mixture. 
The structure and phase state and performance of the obtained coatings were investigated using scanning electron microscopy (Quanta 600) and an energy dispersive analyser (EDAX), scanning probe microscopy (Integra Aura), X-ray diffractometry (Rigaku), an ultramicrohardness tester (Shimadzu), and a scratch tester (CSM Instrumеnts).
It was found that in a gas mixture environment, a high homogeneity of the coating structure was achieved and its defectiveness was lower, although compared to deposition in pure argon the deposition rate went down. Also, a decrease of the surface hardness and a certain increase of the average size of crystallites in the coating were observed. The working atmosphere composition and magnetron discharge power had practically no effect on the target erosion speed. 

1.	Gоncharov I.Yu., Kolesnikov D.A., Novikov V.Ju., Kovaleva M.G., Lytovchenko S.V., Mazilin B.А., Horokh D.V., Beresnev V.M., David Alejandro Diaz Yanez. Investigation of the Effect of the Composition of Residual Gases on the Hardness, Adhesion Properties and the Composition of SiC-AlN Coatings Deposited by the Magnetron Sputtering // J. Nano- and El. Physics. – 2018. – 10, No 3. – 03028 (5pp).