Nanocomposites and nanomaterials

Formation of nanostructured thin film porous systems Nb2O5-porous anodic alumina.
Lebyedyeva T, S., Shpylovyy P. B., Sutkovuy P.G., Frolov Yu. O.  
Department of Devices, Systems and Technologies of Contactless Diagnostics, V.M. Glushkov Institute of Cybernetics of the NAS of Ukraine.
Prospect Acad. Glushkova, 40, Kyiv-03187, Ukraine.
E-mail: lebtetyana@gmail.com

Multilayer nanostructured systems consist of a reflective metal substrate, dielectric barrier and porous layers, and a layer of plasmonic nanostructures (nanoparticles or nanoholes in thin film) have recently attracted attention for their potential applications. Porous anodic alumina (PAA) often is the platform for these nanostructured systems. 
Anodic porous niobium oxide (Nb2O5) has intriguing potential for applications in gas sensors, catalysts and electrochromic devices. Nb2O5 coated PAA membranes might represent a class of materials with excellent biocompatible properties.
But, unlike well-developed technologies for the formation of layers of PAA [1- 2], technologies for the formation of porous layers of anodic niobium oxide with ordered through straight pores of controlled size have not yet been developed.
This paper presents a method for fabricating nanostructures Nb2O5-PAA and Nb2O5-PAA-Al on substrates. According The technology includes the formation of a PAA layer with the required parameters by anodic oxidation of an aluminum film deposited by DC magnetron [2]. After that, a niobium film of the required thickness is deposited on the PAA and anodic Nb2O5 barrier film with pores at the sites of PAA pores is formed by controlled anodic oxidation.
It is shown that the control of anodic oxidation in the manufacturing of nanoporous systems Nb2O5-PAA, carried out with the help of a computerized device created by us, makes it possible to control the thickness of the metals and oxides layers of with an accuracy of 0.5 nm.

1.	Domagalski J. T., Xifre-Perez E., Marsal L. F. Recent Advances in Nanoporous Anodic Alumina: Principles, Engineering, and Applications// Nanomaterials.- 2021.- 11:430.-P. 1-46.
2.	 Lebyedyeva T., Kryvyi S., Lytvyn P., Skoryk M., Shpylovyy P. Formation of  nanoporous anodic alumina by anodization of aluminum films on glass substrates // Nanoscale Res. Let. - 2016. - 11:203. – P. 1-11